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Microporous Ceramic Vacuum Chuck Microporous Ceramic Vacuum Chuck Microporous Ceramic Vacuum Chuck

Microporous Ceramic Vacuum Chuck

The electrostatic vacuum chuck leverages the Coulombic force generated between the workpiece (the object under processing) and the electrode with applied voltage to securely adsorb the workpiece.
  • item no. :

    CS-YHL-XP001
  • Material : Alumina ceramic

  • description
Properties of Alumina Vacuum Chuck


1. Compatible for use in both atmospheric and vacuum environments.

2. Capable of adsorbing conductors, semiconductors, insulators, and porous materials.

3. Simplified clamping and handling mechanism with low electrostatic adsorption energy consumption.

4. Even distribution of adsorption force, eliminating localized stress during adsorption.

5. Gentle support for large-area thin workpieces, preventing scratches and wrinkles during adsorption.

6. Quick activation and deactivation, with no residual potential on the backside of the object, preventing attraction of surrounding dust.




Applications of Alumina Microporous Vacuum Chuck


Ideal for vacuum lamination in panel manufacturing, semiconductor chip packaging, microelectronics integrated circuits, precision optical component manufacturing, and solar photovoltaic production.



Size Chart of Alumina Microporous Vacuum Chuck


Alumina Microporous Vacuum Chuck Square
Item NO. Length (mm) Width (mm) Thickness (mm) Material
CS-YHL-XP001 305 305 14 316 stainless steel + microporous ceramic (brown)
CS-YHL-XP002 305 305 14 316 stainless steel + microporous ceramic (brown)
CS-YHL-XP003 420 275 20 Aluminum alloy + microporous ceramic
CS-YHL-XP004 450 200 20 SKD61 + porous ceramic
CS-YHL-XP005 520 520 20 Aluminum alloy + microporous ceramic

Alumina Microporous Vacuum Chuck Round
Item NO. Diameter (mm) Thickness (mm) Material
CS-YHL-XP006 174 10 316 stainless steel + microporous ceramic
CS-YHL-XP007 220 35 Only alumina ceramic
CS-YHL-XP008 230 16 316 stainless steel + microporous ceramic
CS-YHL-XP009 239 12 Aluminum alloy + microporous ceramic
CS-YHL-XP010 240 12 316 stainless steel + microporous ceramic
CS-YHL-XP011 286 20 Only alumina ceramic
CS-YHL-XP012 320 16 316 stainless steel + microporous ceramic
CS-YHL-XP013 325 12 Aluminum alloy + microporous ceramic



We are committed to delivering optimal alumina vacuum chuck tailored to your exact specifications. Our dedicated team ensures meticulous adherence to your instructions, striving to exceed customer expectations. Additionally, we offer the flexibility of custom sizes to accommodate your unique requirements.

Specification Tolerances:

1. Size Range: 05mm-0800mm
2. Micropore Size: 20-60um
3. Porosity: 30-50%
4. Vacuum Chuck Planar Accuracy: 6-8 inches <3um; 12 inches <5um

Customization Requirements:

1. Provide dimensions, thickness, and shape for 2, 3, 4, 5, 6, 8, 12-inch, and non-standard customizations.
2. Choose from aluminum alloy, stainless steel, ceramic, plastic, and other materials for the base and frame.

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  • Subject :

    Microporous Ceramic Vacuum Chuck CS-YHL-XP001
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