Al2O3 Vacuum Chuck Aluminum Oxide Ceramic Vacuum Chuck

The surface of the alumina vacuum chuck is smooth and has a very strong adsorption force, which can easily absorb and locate the item effectively, and is convenient and safe to use.

Applications of Alumina vacuum chuck

Alumina ceramic vacuum chuck can be used in chip manufacturing, electronic equipment production, photovoltaic industry, etc.

1. Chip manufacturing
In the semiconductor chip production process, alumina ceramic vacuum chuck can be used to absorb and transfer wafer or chip, and ensure that the wafer or chip surface is not scratched and contaminated, and improve production efficiency.

2. Electronic devices
In the process of electronic equipment assembly, alumina ceramic vacuum chuck can be used to absorb small electronic parts, for the purpose of transfer and precision positioning.

3. Photovoltaic industry
The alumina ceramic vacuum chuck can be used in the production of photovoltaic panels to absorb solar cells and transfer them to a set station.

Drawing and specification requirement shall be provided. We are committed to delivering alumina vacuum chucks tailored to your exact specifications. Our dedicated team ensures meticulous adherence to your instructions, striving to exceed customer expectations. Additionally, we offer the flexibility of custom sizes to accommodate your unique requirements.

Machining Precision

1. CSCERAMIC can meet the specifications of the tolerance as follow:
2. Diameter tolerance: ±0.002mm
3. Hole depth tolerance: ±0.005mm
4. Surfance roughness:Ra0.5μm
5. Cylindricity:±0.004mm
6. Concentricity:±0.003mm
7. Other information as described in the product specification.

Usage Instructions

1. Check to confirm that there is no crack on the surface of the alumina ceramic vacuum chuck. If there is a crack, air may be injected into it, and vacuum adsorption cannot be achieved.

2. Check the surface finish and flatness to ensure the adsorption capacity.

3. Avoid bumping during installation and use, so as not to damage the ceramic vacuum chuck.

4. It is necessary to test the adsorption force of the ceramic vacuum chuck when perform commissioning of the production system, and put into use after meeting the requirements.

5. Regularly check the surface of the ceramic suction sheet, timely clean up debris and dirt, and replace the cracked or damaged suction sheet.