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Thermal Analysis Sample Pans丨Crucibles丨Accessories
- TA
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C/S- O/N/H Analysis consumables
- LECO/Eltra/Alpha/Horiba/Elementar Consumables
- Elementar Ceramic Consumables
- Bruker Ceramic Consumables
- CKIC Ceramic Consumables
- OEM Elemental Analyzer Ceramic Consumables
Alumina Ceramic
- Alumina Ceramic Crucibles|Combustion Boats
- Alumina Ceramic Tubes & Rods
- Alumina Substrates/Plates/Sheets
- Alumina Balls and Ball Mill Jar
- Alumina Industrial Parts
Zirconia Ceramic
- Zirconia Tube & Rod
- Zirconia Grinding Media Ball
- Zirconia Crucible
- Zirconia Ball Valve
- Zirconia Mill Jar
- Zirconia Bearing
- Zirconia Filtering Foam
- Zirconia Dental Teeth
- Zirconia Plate
- Zirconia Industrial Parts
- Magnesia Stablized Zirconia Ceramics
- Zirconia Toughened Alumina (ZTA) Ceramic
Silicon Carbide Ceramic
- Silicon Carbide Tube
- Silicon Carbide Crucible
- Silicon Carbide Seal Rings
- Silicon Carbide Plate
- Silicon Carbide Nozzle
- Silicon Carbide Balls
- Silicon Carbide Mechanical Components
- Nitride Bonded Silicon Carbide (NBSIC) Ceramic
Boron Nitride Ceramic
Platinum Crucibles
Graphite Crucibles
Quartz
- Quartz Ceramic
  - Quartz Ceramic Crucibles & Boats
- Quartz Glass
Aluminium Nitride Ceramic
- Aluminium Nitride Crucible
- Aluminum Nitride Substrates/Sheets
- Aluminum Nitride Tubes & Rods
- Aluminium Nitride Parts
Grinding Balls
Laboratory Porcelain Labware
- Porcelain Crucible with Lids
- Mortar with Pestle
- Evaporating Dishs
- Combustion Boats/Tubes
- Funnels with Perforated Filter Disc
- Spotting Plates
- Beakers with Flange
- Pipeclay Triangle
- Desiccator Discs
Gold Melting Ceramic Crucible
- Fire assay crucibles
- Magnesia Cupel/Bone ash Cupel
- Gold Melting Bowl
Silicon Nitride Ceramics
Magnesia Ceramics
Boron Carbide Ceramic
Ceramic Sputtering Targets
Transparent Ceramics
Metalized Ceramics
Alumina Silicate Ceramics
Boron Nitride Ceramics

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High-Purity SiC Tray for Semiconductor RTA PVD ICP CMP Processes

The high-purity silicon carbide tray, formed through sintering, serves as a durable carrying device in semiconductor manufacturing processes like RTA, PVD, ICP, and CMP.

item no. :
CS-THG-CZ1001
Material : SiC

contact now catalogue

description

Properties of SiC Silicon Carbide Tray

Superior Thermal Management:
- The SiC Tray boasts excellent thermal conductivity, ensuring efficient heat transfer during the semiconductor manufacturing process.
- With a low thermal expansion coefficient, it maintains dimensional stability, reducing the risk of warping or cracking under thermal stress.
- It exhibits outstanding thermal shock resistance, allowing it to withstand rapid temperature changes without damage.
High Temperature & Plasma Durability:
- Designed for extreme temperature resistance, the SiC Tray can endure the high temperatures encountered in semiconductor processing environments.
- Its plasma impact resistance makes it ideal for applications involving plasma etching or other plasma-based processes, ensuring longevity and reliability.
Chemical Resistance:
- The tray is resistant to a wide range of strong acids, alkalis, and chemical reagents, providing robust protection against corrosive materials commonly used in semiconductor manufacturing.
- This chemical inertness ensures consistent performance and extended service life, reducing the need for frequent replacements.
Exceptional Mechanical Properties:
- Characterized by high hardness and high strength, the SiC Tray offers exceptional durability and load-bearing capacity.
- Its good wear resistance ensures that the tray maintains a smooth, precise surface over time, minimizing the risk of particle contamination in sensitive manufacturing processes.

Applications of SiC Silicon Carbide Tray

The SiC Tray serves as a critical carrying plate in the manufacturing processes of semiconductors, including LED production. Its unique combination of thermal, chemical, and mechanical properties makes it an indispensable component for ensuring the precision, reliability, and efficiency of modern semiconductor manufacturing operations.

Size Chart of SiC Silicon Carbide Tray

Please provide drawing and parameter requirements for customization.

Silicon Carbide Tray SiC PVD Tray
Item NO.	Diameter (mm)	Thickness (mm)	SiC's Purity (%)
CS-THG-CZ1001	230	3	99
CS-THG-CZ1002	300	1.4	99
CS-THG-CZ1003	300	3	99
CS-THG-CZ1004	330	1.4	99
CS-THG-CZ1005	330	3	99

Silicon Carbide Tray SiC ICP Tray
Item NO.	Diameter (mm)	Thickness (mm)	SiC's Purity (%)
CS-THG-CZ2001	300	3	99
CS-THG-CZ2002	300	4.4	99
CS-THG-CZ2003	330	4.4	99
CS-THG-CZ2004	330	3	99
CS-THG-CZ2005	380	4.4	99
CS-THG-CZ2006	380	3	99