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SiC Wafer Carrier Boat
SiC Wafer Carrier Boat for Semiconductor & Solar Cell Diffusion Furnace Handling SiC Wafer Carrier Boat for Semiconductor & Solar Cell Diffusion Furnace Handling

SiC Wafer Carrier Boat for Semiconductor & Solar Cell Diffusion Furnace Handling

SiC Wafer Boat is essential for carrying wafers into diffusion furnaces for coating treatment in semiconductor & photovoltaic production.
  • item no. :

    CS-SIC-J1001
  • Material : SiC

  • description

Properties of Silicon Carbide Wafer Carrier Boat



  1. High-Temp Resistance: Our SiC Wafer Boat withstands temperatures up to 1600°C with excellent thermal shock resistance, ensuring a lifespan exceeding 5 years.

  2. High Purity & Impurity-Free: Made from high-purity SiC, it avoids impurity introduction, reduces equipment pollution, and enhances product quality.

  3. Lightweight & Durable: Featuring lightweight construction with high bending strength and high-temp bearing capacity, it minimizes loading system size for higher single-batch production output.

  4. Thermal Stability & Maintenance-Free: With a minimal thermal expansion coefficient similar to LPCVD coatings, it significantly extends maintenance and cleaning cycles when used in LPCVD applications.




Applications of Silicon Carbide Wafer Carrier Boat


Ideal for Photovoltaic Cell and Semiconductor Wafer Manufacturing, our SiC wafer boat excels in carrying solar silicon wafers and semiconductor wafers in diffusion furnaces at temperatures ranging from 1000-1300°C.


Customized Design for SiC Wafer Carrier Boat

Please provide drawing and parameter requirements for customization.



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